Monolithically integrated waveguide-coupled silica microtoroids

Richter, J. and Nezhad, M.P. and Witzens, J. (2015) Monolithically integrated waveguide-coupled silica microtoroids. In: Opto-Electronics and Communications Conference (OECC), Shanghai, 28 June - 2 July 2015.

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We report on the design and fabrication of a new type of microtoroid high-Q silica resonators monolithically coupled to on-chip silicon nanowire waveguides. In order to enable monolithic waveguide coupling, the microtoroid geometry is inverted such that the resonator is formed by thermal reflow at the circumference of a hole etched in a suspended SiO2 membrane. This configuration is shown to be conducive to integration with a fully functional Silicon Photonics technology platform.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: Research Publications
Departments: College of Physical and Applied Sciences > School of Electronic Engineering
Date Deposited: 07 Apr 2016 02:20
Last Modified: 07 Apr 2016 02:20
URI: http://e.bangor.ac.uk/id/eprint/6460
Identification Number: DOI: 10.1109/OECC.2015.7340232
Publisher: IEEE publishing
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