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Charging characteristics of ultra-nano-crystalline diamond in RF MEMS capacitive switches

Goldsmith, C. and Sumant, A. and Auciello, O. and Carlisle, J.A. and Zeng, H. and Hwang, J. and Palego, C. and Wang, W. and Carpick, R. and Adiga, V.P. and Datta, A. and Gudeman, C. and O'Brien, S. and Sampath, S. (2010) Charging characteristics of ultra-nano-crystalline diamond in RF MEMS capacitive switches. In: Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010.

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Abstract

Modifications to a standard capacitive MEMS switch process have been made to allow the incorporation of ultra-nano-crystalline diamond as the switch dielectric. The impact on electromechanical performance is minimal. However, these devices exhibit uniquely different charging characteristics, with charging and discharging time constants 5-6 orders of magnitude quicker than conventional materials. This operation opens the possibility of devices which have no adverse effects of dielectric charging and can be operated near-continuously in the actuated state without significant degradation in reliability.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: Research Publications
Departments: College of Physical and Applied Sciences > School of Electronic Engineering
Date Deposited: 27 Jan 2016 03:36
Last Modified: 22 Mar 2016 03:35
ISSN: 0149-645X
URI: http://e.bangor.ac.uk/id/eprint/6166
Identification Number: DOI: 10.1109/MWSYM.2010.5517781
Publisher: IEEE publishing
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