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Electro-thermal analysis of RF MEM capacitive switches for high-power applications

Solazzi, F. and Palego, C. and Halder, S. and Hwang, J. and Faes, A. and Mulloni, V. and Margesin, B. and Farinelli, P. and Sorrentino, R. (2010) Electro-thermal analysis of RF MEM capacitive switches for high-power applications. In: Proceedings of the EuropeanSolid-State Device Research Conference (ESSDERC), Sevilla, 2010.

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Abstract

Self heating in electrostatically actuated RF MEM capacitive shunt switches is analyzed by coupled electrical and thermal simulations using three-dimensional finite-element analysis. The result shows that despite highly nonuniform current and temperature distributions, the self-heating effect can be approximated by lumped thermal resistances of the switch membrane and the substrate. Additionally, since the thermal resistance of thermally insulating substrates such as quartz is significant compared to that of the membrane, it is important to consider the heat transfer across both the membrane and the substrate.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: Research Publications
Departments: College of Physical and Applied Sciences > School of Electronic Engineering
Date Deposited: 27 Jan 2016 03:36
Last Modified: 27 Jan 2016 03:36
ISSN: 1930-8876
URI: http://e.bangor.ac.uk/id/eprint/6164
Identification Number: DOI: 10.1109/ESSDERC.2010.5618174
Publisher: IEEE publishing
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