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Pull-in and release transients of MEMS capacitive switches under high RF power

Palego, C. and Molinero, D. and Yaqing Ning, and Xi Luo, and Hwang, J.C.M. and Goldsmith, C.L. (2012) Pull-in and release transients of MEMS capacitive switches under high RF power. In: 7th European Microwave Integrated Circuits Conference (EuMIC), Amsterdam, 29-30 October 2012.

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Abstract

For the first time, both pull-in and release transients were characterized under high RF power levels on electrostatically actuated capacitive switches that exhibited little ambient temperature dependence under small-signal conditions. In spite of the complication of buckling, thermal resistances and time constants were extracted for both pulled-in and released states. In the pulled-in state, the extracted thermal resistance and time constant were approximately 5000°C/W and 40μs, respectively. In the released state, the corresponding values were approximately 3000°C/W and 100μs, respectively. These extracted parameters could serve as the foundation for physical understanding, as well as compact modeling of large-signal transients. They could also help improve the design of switches that are more robust against temperature change and RF loading.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: Research Publications
Departments: College of Physical and Applied Sciences > School of Electronic Engineering
Date Deposited: 27 Jan 2016 03:36
Last Modified: 27 Jan 2016 03:36
URI: http://e.bangor.ac.uk/id/eprint/6158
Publisher: IEEE publishing
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