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Effect of the substrate on RF power-handling capability of micro-electromechanical capacitive switches

Solazzi, F. and Palego, C. and Halder, S. and Hwang, J.C.M. and Faes, A. and Mulloni, V. and Margesin, B. and Farinelli, P. and Sorrentino, R. (2011) Effect of the substrate on RF power-handling capability of micro-electromechanical capacitive switches. Solid-State Electronics Special Issue, 65-66. pp. 219-225. DOI: 10.1016/j.sse.2011.06.020

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Abstract

RF power-handling capacity of micro-electromechanical capacitive switches was modeled by multiphysics finite-element analysis. Coupled electromechanical, electrothermal and thermomechanical models were constructed by using commercially available software. Simulations by using the models were validated by small- and large-signal RF measurements. The measurements showed that the power-handling capacity of the switches depended on not only the properties of the membrane (the movable part of the switches), but also the substrate properties and the circuit environment. These effects were captured in a compacted model, which could be used to guide the improvement of the power-handling capacity of the switches.

Item Type: Article
Subjects: Research Publications
Departments: College of Physical and Applied Sciences > School of Electronic Engineering
Date Deposited: 19 Jan 2016 03:20
Last Modified: 19 Jan 2016 03:20
ISSN: 0038-1101
URI: http://e.bangor.ac.uk/id/eprint/6093
Identification Number: DOI: 10.1016/j.sse.2011.06.020
Publisher: Elsevier
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